Characterization of quantum-weight generating cantilever device |
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| Jae-Hyuk Choi, Kwang-Cheol Lee, Yun-Won Kim, Min-Seok Kim |
- Abstract:
- Quantum-weight generating cantilever devices comprising a 20 micron-sized ringshaped Niobium film deposited on the paddle of an ultrasoft single-crystalline silicon cantilever were characterized. High-quality niobium film was patterned by optical lithography and deposited using an ultra-high-vacuum sputter system within the microfabrication process of cantilevers, which adopts double-side reactive-ion-etching. The fabricated niobium film was observed using scanning electron microscope and atomic force microscope, and its superconducting property was also examined from lowtemperature resistivity measurement. Thermal noise spectrum and frequency scan of cantilever vibration were measured at a room temperature to obtain resonance frequencies and quality factors of the device.
- Keywords:
- quantum-weight, ultrasoft cantilever, niobkim film
- Download:
- IMEKO-TC3-2007-024u.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC3
- Event name:
- Cultivating Metrological Knowledge
- Title:
20th Conference on Measurement of Force, Mass and Torque (together with 3rd TC16 Conference on Pressure Measurement & 1st TC22 Conference on Vibration Measurement)
- Place:
- Merida, MEXICO
- Time:
- 27 November 2007 - 01 December 2007