INTEGRATED BLOOD FLOWMETER USING MICROMACHINING TECHNOLOGY |
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| Yukie Omori, Renshi Sawada, Susumu Sakano |
- Abstract:
- The micro machining technology has been advanced on the basis of the semiconductor manufacturing technology. In this study, the research on the manufacturing the integrated micro optical sensor accumulated LD and PD on the semiconductor substrate is practiced. The fabrication method is the technology of photolithography and etching technology in the semiconductor manufacturing. The blood flow meter is taken up as a typical application of the micro optical sensor.
- Download:
- IMEKO-TC4-2004-082.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC4
- Event name:
- TC4 Symposium 2004
- Title:
- XIII IMEKO TC4 International Symposium on Measurements for Research and Industrial Applications (together with IXth International Workshop on ADC Modeling and Testing, IWADC)
- Place:
- Athens, GREECE
- Time:
- 29 September 2004 - 01 October 2004