STUDY OF CERTIFIED REFERENCE MATERIAL PREPARATION TECHNIQUE FOR MICROELECTRONIC DIGITAL CIRCUITS
Senzu Shen, Wenjun Chang, Hua Li, Qian Liu, Minghu Zhang
Abstract:
This paper introduces an alternative method to traditional certified reference material (CRM) preparation technique for microelectronic digital circuits. Instead of self-manufacturing chips, a novel preparation technique is introduced which selects matured samples as the CRMs, these samples are also called certified reference samples (CRSs). The use of CRS not only greatly reduces the difficulties of preparation, but also brings microelectronic CRM preparation technique to a new domain. Finally, the preparation contents and methods, the preparation processes, as well as the maintenance, preservation and usage of the CRS are discussed in detail in this paper.
Keywords:
Microelectronic Digital Circuit, Certified Reference Material (CRM), Certified Reference Sample (CRS)
Download:
IMEKO-WC-2009-TC8-088.pdf
DOI:
-
Event details
Event name:
XIX IMEKO World Congress
Title:

Fundamental and Applied Metrology

Place:
Lisbon, PORTUGAL
Time:
06 September 2009 - 11 September 2009
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