DEVELOPMENT OF A LOW–COST MEASUREMENT SYSTEM FOR CUTTING EDGE PROFILE DETECTION

Gregor Gerstorfer, Bernhard G. Zagar
Abstract:
This paper describes the use of a CD pickup head as a displacement measurement system. First, the components contained in a pickup head are explained and how they are combined to obtain the functionality of a pickup head. Afterwards, the application of measuring a knife edge profile is introduced.The results revealed some insuffiencies with the current system. Nevertheless, the cutting edge’s radius of curvature can be estimated.
Keywords:
optical pickup head, CD, profile measurement.
Download:
IMEKO-TC2-2010-06.pdf
DOI:
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Event details
IMEKO TC:
TC2
Event name:
TC2 Symposium 2010
Title:
19th Symposium on Photonic Measurements
Place:
Hangzhou, CHINA
Time:
11 September 2010 - 13 September 2010