CALIBRATION OF CAPACITANCE DIAPHRAGM GAUGE WITH 1333 PA FULL SCALE BY DIRECT COMPARISON TO RESONANT SILICON GAUGE AND STATIC EXPANSION SYSTEM |
|---|
| H. Yoshida, E. Komatsu, K. Arai, M. Kojima, H. Akimichi, T. Kobata |
- Abstract:
- Two capacitance diaphragm gauges (CDGs) with 1333 Pa full scale were calibrated by three different methods; direct comparison to a resonant silicon gauge calibrated by a pressure balance, direct comparison to a CDG with 133 Pa full scale calibrated by a static expansion method, and the static expansion method. The calibration results by the three calibration results show in good agreement within their claimed uncertainties. It is demonstrated that calibrated pressure points by the pressure balance and the static expansion system are linearly interpolated by considering the calibration uncertainty of the CDGs appropriately.
- Keywords:
- pressure, vacuum, standard, calibration, capacitance diaphragm gauge, thermal transpiration effect
- Download:
- IMEKO-WC-2012-TC16-O9.pdf
- DOI:
- -
- Event details
- Event name:
- XX IMEKO World Congress
- Title:
Metrology for Green Growth
- Place:
- Busan, REPUBLIC of KOREA
- Time:
- 09 September 2012 - 12 September 2012