PRIMARY VACUUM STANDARD CMI FOR UHV PRESSURE RANGE 1 × 10-6 TO 1 × 10-10 Pa |
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| T. Gronych, L. Peksa, M. Jeráb, Z. Krajícek, D. Pražák, F. Stanek, M. Vicar, J. Tesar |
- Abstract:
- A primary vacuum standard for UHV pressure range is under development in Czech Metrology Institute (CMI). In order to cover the UHV range down to the limit 1 × 10-10 Pa a method of calibration in non-equilibrium gas (so called dynamic extension method) was employed. The apparatus is divided into three parts: the dynamic extension stage, the orifice flow standard and the flowmeter. The dynamic extension stage is designed as an XHV apparatus manufactured from a low outgassing rate material – beryllium copper alloy. A special 4 K bakeable refrigerator cryopump is used as the main pump.
- Keywords:
- primary vacuum standard, vacuum gauge calibration in UHV range
- Download:
- IMEKO-WC-2012-TC16-P4.pdf
- DOI:
- -
- Event details
- Event name:
- XX IMEKO World Congress
- Title:
Metrology for Green Growth
- Place:
- Busan, REPUBLIC of KOREA
- Time:
- 09 September 2012 - 12 September 2012