LASER INTERFERENCE THERMOMETRY OF SOLIDS IN PLASMAS
A. N. Magunov
Abstract:
Laser interferometric thermometry of semiconductor and dielectric plates is the most sensitive and reliable technique for measurements in plasma processing. This technique can be used within a wide range of experimental conditions, including roughness and thin films on the surface, non-parallelism of surfaces, almost any angle of light incidence. Some results on the temperature monitoring of silicon crystal heated in a plasma and on the end-point detection of exothermic plasma chemical reaction on the surface are presented.
Keywords:
laser thermometry, plasma surface interaction
Download:
IMEKO-WC-2000-TC12-P310.pdf
DOI:
-
Event details
Event name:
XVI IMEKO World Congress
Title:

Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future

Place:
Vienna, AUSTRIA
Time:
25 September 2000 - 28 September 2000
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