APPLICATION OF FOCUSED LASER BEAM IN LINEAR ENCODER |
|---|
| M. Dobosz |
- Abstract:
- The idea of high resolution (0,01 µm) displacement encoder with laser diode light beam focused on the scale surface is presented. Due to application of the focused laser beam the acceptable tilts of the encoder head relative to the grating in the prototype device reach about of 0,5 arc degree in all directions and the tolerance of the distance between head and the grating is equal to about 0.1 mm. A new simple reference point detection method that use a scale grating edge as an reference point has been proposed. This technique allows significant reduction of nonlinearity errors of the measuring system. Nonlinearity of the prototype device does not exceed 0,1 µm in 48 mm measuring range.
- Keywords:
- displacement measurement; interferometer; laser diode; diffraction grating; focused light
- Download:
- IMEKO-WC-2000-TC14-P364.pdf
- DOI:
- -
- Event details
- Event name:
- XVI IMEKO World Congress
- Title:
Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future
- Place:
- Vienna, AUSTRIA
- Time:
- 25 September 2000 - 28 September 2000