NANO-PROBE USING OPTICAL SENSING |
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| K. Enami, M. Hiraki, K. Takamasu |
- Abstract:
- Nano-Probe System is described in this paper. Recently industrial parts have been smaller in size of sub-micrometer order. Therefore it is needed to measure such small mechanical parts in high accuracy. For this purpose we have developed nano-CMM(Coordinate Measuring Machine), whose resolution is nano-meter order. We are now developing a probe attached to nano-CMM, which is named nanop- Probe. It must be small enough and be able to detect touch of an object with high sensitivity. As a principle of nano-Probe system, we have proposed Optical Sensing System, new system that can detect displace of a metal ball and carried out basic experiment. We are making prototype. Experiment that inspects availability of Optical Sensing System is done.
- Keywords:
- Coordinate Measuring Machine, probe, three dimensional nanometer measurement
- Download:
- IMEKO-WC-2000-TC14-P366.pdf
- DOI:
- -
- Event details
- Event name:
- XVI IMEKO World Congress
- Title:
Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future
- Place:
- Vienna, AUSTRIA
- Time:
- 25 September 2000 - 28 September 2000