PHASE-DETECTION WAVELENGTH-SCANNING INTERFEROMETRY |
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| J. Kato, I. Yamaguchi |
- Abstract:
- We have realized an accurate height measurement for discontinuous shape by using the wavelength scanning interferometry combined with phase-shifting technique. It is based on detection of phase variation slope along the wavenumber axis at each pixel of a CCD camera that takes a number of phase-shifted interferograms using a PZT mirror. By using a tunable laser diode with wavelengthscanning range of 8 nm and scanning step of 0.2 nm, a height standard deviation of 40 nm could be obtained for the depth of ± 0.75 mm. This technique was applied to profile measurements of an aspherical mirror and rough-surface objects.
- Keywords:
- wavelength-scanning interferometry, phase analysis, profilometry
- Download:
- IMEKO-WC-2000-TC14-P377.pdf
- DOI:
- -
- Event details
- Event name:
- XVI IMEKO World Congress
- Title:
Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future
- Place:
- Vienna, AUSTRIA
- Time:
- 25 September 2000 - 28 September 2000