SCATTEROMETRY OF MACHINED SURFACES |
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| C. Lukianowicz, T. Karpinski |
- Abstract:
- Measurements of surface roughness by scattering methods are the subjects of this paper. Theoretical and experimental studies of the light scattering from machined surfaces are presented. Two-dimensional fast Fourier transform (2-D FFT) algorithm for computer simulation of diffraction field is applied. A discussion of modelling scattered light from periodical and random surfaces is given as well. Survey of scattering methods for measuring of rough machined surfaces is concise presented. A description of method for evaluation of moving rough surface is also given. This method involves measurements of the angular distribution of scattered light. Experimental results of measurements of machined rough surfaces are presented. These results show applicability of this method in process control.
- Keywords:
- scatterometry, measurements of surface roughness
- Download:
- IMEKO-WC-2000-TC14-P383.pdf
- DOI:
- -
- Event details
- Event name:
- XVI IMEKO World Congress
- Title:
Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future
- Place:
- Vienna, AUSTRIA
- Time:
- 25 September 2000 - 28 September 2000