STANDARDLESS PROFILE MEASUREMENT ALONG CIRCLES |
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| S. Sonozaki, K. Iwata, Y. Iwahashi |
- Abstract:
- In this paper, profiles along concentric circles on two precise mirrors are measured by using a Fizeau-interferometer with no standard. For the measurements, spacing between the two flat mirrors is measured with the interferometer at the angles of every 5 degrees along the circles. With these data, profiles are calculated using the Fourier transformation method and linear equation method. Profiles along ten concentric circles are calculated from the data although the mean plane of each profile is different. Discussion is made on the calculation of two-dimensional surface profiles along the different concentric mean planes. The results of the profiles calculated using different number of the data are compared with each other to show their respective features.
- Keywords:
- surface profile, profile measurement, precise mirror, interferometer
- Download:
- IMEKO-WC-2000-TC14-P404.pdf
- DOI:
- -
- Event details
- Event name:
- XVI IMEKO World Congress
- Title:
Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future
- Place:
- Vienna, AUSTRIA
- Time:
- 25 September 2000 - 28 September 2000