NEW APPROACH IN INTERFEROMETRIC LENGTH MEASUREMENTS |
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| A. Titov, I. Malinovsky, C. A. Massone |
- Abstract:
- Interferometric length measurements without parallax error, based on the phenomenon of the reproducible wringing, are demonstrated. Using reproducible wringing together with the slave-block technique, accuracy level below 1 nm can be obtained for blocks of a few mm length with small flatness deviation. Phase change correction determination with sub-nm uncertainty is achieved for blocks up to 100 mm. Comparing the results of the double-ended method on a transparent reference plate with the reproducible wringing results, measurements without parallax error can be performed in the general case with a nm uncertainty.
- Keywords:
- meter realization, gauge block, Abbe error, uncertainty, interferometry
- Download:
- IMEKO-WC-2000-TC14-P406.pdf
- DOI:
- -
- Event details
- Event name:
- XVI IMEKO World Congress
- Title:
Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future
- Place:
- Vienna, AUSTRIA
- Time:
- 25 September 2000 - 28 September 2000