DEVELOPMENT OF ACTIVE JOURNAL SQUEEZE AIR BEARING WITH PIEZOELECTRIC ACTUATORS |
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| H. Isobe, A. Kyusojin |
- Abstract:
- Squeeze air bearings are based on a phenomenon known as the squeeze effect, which causes a pressured air film with relative perpendicular oscillation between two planes. The aim of this study is to achieve non-contact active motion error correction with squeeze effect. Hence, it has ability to be operated even if no pressured air supply and no relative sliding motion between them. The experimental device has piezo-driven oscillating pads and central rotating shaft. Piezos are controlled by two kinds of signals. One is the sinusoidal signal stimulate the squeeze motions. The other is the operation signal, which controls the floating shaft movement by the travel of oscillating pads. Therefore, application of a controllable pattern on piezos allows the shaft to be manipulated in the multi degreeof- freedom. The run-out of shaft was reduced from 8.1 um to 2.4 um and variation of attitude became to be undetectable. The run-out was improved by decreasing the clearance between shaft and pads by increasing the air film stiffness. Applying the feedback control to make the device more accurate, the run-out was reduced successfully.
- Keywords:
- squeeze gas bearing, piezoelectric actuator, motion error correction
- Download:
- IMEKO-WC-2000-TC15-P420.pdf
- DOI:
- -
- Event details
- Event name:
- XVI IMEKO World Congress
- Title:
Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future
- Place:
- Vienna, AUSTRIA
- Time:
- 25 September 2000 - 28 September 2000