LASER OPTICAL STRAIN SENSOR FOR MATERIAL TESTING |
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| M. Anwander, B. Weiss, C. Kargel, B. Trummer H. Weiss, B. Zagar |
- Abstract:
- To increase the reliability of microelectronic components it is frequently required to determine mechanical and thermal properties of the base material in its practical dimensions (e.g. thin foils and films, thin wires, membranes). Due to the known "size effect" these material properties cannot be deduced from macro deformation data. In this investigation a non-contacting laser optical strain sensor is being used to determine deformation data of the so called micromaterials in combination with a specially designed microtensile machine. The strain sensor is based on a laser optical speckle correlation method. The applicability and limitations of this laser sensor is being discussed. Changes of mechanical properties are related to microstructural changes being investigated with special techniques using the electron channeling contrast microscope and a scanning electron microscope.
- Keywords:
- laser optical strain sensor, micromaterials, size-effect, thin foils
- Download:
- IMEKO-WC-2000-MNT-P478.pdf
- DOI:
- -
- Event details
- Event name:
- XVI IMEKO World Congress
- Title:
Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future
- Place:
- Vienna, AUSTRIA
- Time:
- 25 September 2000 - 28 September 2000