TOLERANCES FOR MICROTECHNOLOGIES |
|---|
| E. Westkämper |
- Abstract:
- Microsystems are miniaturised technical components in dimensions of mm, which consist of mechanical and electronic or optic functions and functional elements. Microsystems are used as sensors and actuators in different applications for automobiles, medical techniques or peripheral computer equipment. They are manufactured in series or small series. Sensors, actuators and many technical microproducts require components with small dimensional form and surface tolerances in the µm range. If one includes the physical processes, precision starts to reach nano levels. The tolerances of microsystems are defined as functional tolerances. This paper deals with requirements for tolerancing systems for miniaturised components and functional elements. The different criteria and systems as well as basics for possible standards are elaborated. It is even a contribution to the discussion about the necessity of new tolerancing systems, questions of calibration and the usage of measuring systems to detect deviations in microgeometry, physical characterisation and integration of measurement in industrial manufacturing systems.
- Keywords:
- microtechnology, measurement, tolerances
- Download:
- IMEKO-WC-2000-MNT-P490.pdf
- DOI:
- -
- Event details
- Event name:
- XVI IMEKO World Congress
- Title:
Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future
- Place:
- Vienna, AUSTRIA
- Time:
- 25 September 2000 - 28 September 2000