Electromechanical characterizations of MEMS based energy harvesters by harmonic sampling analysis method |
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| Alexandre Bounouh, Denis Bélières |
- Abstract:
- This paper presents a new and accurate experimental method based on electrical harmonic distortion analysis to determine mechanical characteristics (resonant frequency) of MEMS devices used in widespread applications as in energy scavenging, cantilever-based microsystems for gas sensing and atomic force microscopy or in any kind of MEMS resonators. Resonant frequencies ranging from 0.8 kHz to 5 kHz of electrostatic actuated MEMS-based harvesters have been measured by this technique with an uncertainty as low as a few parts in 103 constituting an outstanding result compared to the other methods.
- Keywords:
- MEMS, resonant frequency, damping factor, Distortion analysis, sampling measurement
- Download:
- IMEKO-TC4-2013-047.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC4
- Event name:
- TC4 Symposium 2013
- Title:
- 19th IMEKO TC4 Symposium Measurements of Electrical Quantities (together with 17th TC4 IWADC Workshop on ADC and DAC Modelling and Testing)
- Place:
- Barcelona, SPAIN
- Time:
- 18 July 2013 - 19 July 2013