FIBER-COUPLED MICROOPTCAL INTERFEROMETRIC SENSOR FOR PRECISION ENGINEERING APPLICATIONS |
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| Peter Lehmann, Markus Schulz |
- Abstract:
- Industrial inspection of precision manufactured mechanical or optical components requires flexible, accurate, fast and reasonably priced optical sensors. We present a combination of interferometric and confocal sensor based on a fiber-coupled micro-optical probe. Owing to its micro-optical realization, its low mass, and the high data rate the probe head of the sensor can be used for very fast surface contour tracking.
- Download:
- IMEKO-TC14-2011-03.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 LMPMI Symposium 2011
- Title:
10th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry
- Place:
- Braunschweig, GERMANY
- Time:
- 12 September 2011 - 14 September 2011