COMPARISON OF A SCANNING INTERFEROMETRIC PROFILE MEASUREMENT METHOD AND AN ULTRA-PRECISE COORDINATE MEASURING MACHINE |
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| A. Wiegmann, M. Schulz, K. Yoshizumi, K. Kubo, D. Ramm |
- Abstract:
- Comparative profile measurements of a testspecimen with a diameter of 150 mm and a peak-to-valley height of 50 µm carried out by an ultra-precise coordinate measuring machine (Panasonic UA3P) and a highly accurate scanning interferometric multi-sensor instrument (ETMS) are presented. The instruments and their principles are described. Although the measurement principles of the instruments are different, the measurements agree within the claimed uncertainties. The rms-difference of the measurement results is less than 20 nm.
- Download:
- IMEKO-TC14-2011-15.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 LMPMI Symposium 2011
- Title:
10th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry
- Place:
- Braunschweig, GERMANY
- Time:
- 12 September 2011 - 14 September 2011