CRYSTALLINE SURFACES FOR LASER METROLOGY |
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| A.V. Latyshev |
- Abstract:
- The number of methodological recommendations has been pronounced to describe correctly low-dimensional structures up to atomic resolution and to fabricate crystalline surfaces for applicability in nanoscale metrology. Technology of an extremely flat mirror for optical and laser metrology has been demonstrated on the base of crystalline surface. Stepped crystalline surface with controlled steps distribution is a precise calibrator at nanoscale measurements which is suitable for high-resolution techniques. The precision of measurements performed by atomic-force microscopy (AFM) and high-resolution electron microscopy (HREM) for solving problems of metrology and diagnostics of solid nanostructures is discussed.
- Download:
- IMEKO-TC14-2011-28.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 LMPMI Symposium 2011
- Title:
10th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry
- Place:
- Braunschweig, GERMANY
- Time:
- 12 September 2011 - 14 September 2011