HIGH PRECISION DIMENSIONAL METROLOGY OF PERIODIC NANOSTRUCTURES USING LASER SCATTEROMETRY

B. Bodermann, S. Bonifer, E. Buhr, A. Diener, M. Wurm
Abstract:
At PTB different laser scatterometers with partly novel and outstanding metrological capabilities have been developed and are available for high-resolution dimensional metrology of periodic nanostructures. Two different systems are described and their metrological potential discussed: a laser diffractometer for pitch calibration and a versatile goniometric scatterometer for multi-parameter characterisation of nanostructures.
Download:
IMEKO-TC14-2011-29.pdf
DOI:
-
Event details
IMEKO TC:
TC14
Event name:
TC14 LMPMI Symposium 2011
Title:

10th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry

Place:
Braunschweig, GERMANY
Time:
12 September 2011 - 14 September 2011
 Back