INTERFEROMETRIC MEASURING SYSTEMS OF NANOPOSITIONING AND NANOMEASURING MACHINES |
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| T. Hausotte, B. Percle, N. Vorbringer-Dorozhovets, H. Baitinger, F. Balzer, U. Gerhardt, E. Manske, G. Jäger, D. Dontsov |
- Abstract:
- The Nanopositioning and Nanomeasuring Machine (NMM-1) developed at the Ilmenau University of Technology is equipped with three homodyne plane-mirror miniature interferometers for the measurement of the displacement of a movable corner mirror. The object being measured is placed on the corner mirror, which is positioned by a three-axis drive system. The probing system and the plane-mirror miniature interferometers are fixed on a metrology frame made of Zerodur®. Depending on the selected probing system, the machine is capable of carrying out both 2½D surface scans and 3D coordinate measurements. In this way objects can be measured or scanned in volumes up to 25 mm × 25 mm × 5 mm with nanometre precision using various optical and tactile probe systems.
- Download:
- IMEKO-TC14-2011-45.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 LMPMI Symposium 2011
- Title:
10th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry
- Place:
- Braunschweig, GERMANY
- Time:
- 12 September 2011 - 14 September 2011