IN-SITU TRACEABLE CHARACTERIZATION OF THE DEPTH SENSING SYSTEM OF A NANOINDENTATION INSTRUMENT |
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| Zhi Li, Uwe Brand, Radovan Popadic |
- Abstract:
- Nanoindentation testing has proven to be effective for the determination of the mechanical properties of small structures. Accurate material measurements demand that nanoindentation instruments, especially their depth sensing system, be carefully calibrated.
Here a homodyne laser interferometer is realized for insitu investigation of the displacement measuring performance of a commercial nanoindentation instrument. By means of real-time inspection of the axial movement of a spherical indenter mounted on the transducer of the nanoindentation instrument, the developed laser interferometer is capable of traceable calibration of the instrument’s depth sensing system with nanometric resolution, whilst needing no additional measurement mirror.
Preliminary experimental results reveal that the nanoindentation instrument under calibration demonstrates adequate linearity within a limited measurement range. The interferometric calibration efforts will help to improve the measurement accuracy not only of conventional mechanical properties like Young’s modulus and hardness, but also for the time constant and the complex modulus of viscous materials. - Keywords:
- indentation instrument, depth sensing indentation, traceable calibration, homodyne laser interferometer
- Download:
- IMEKO-TC14-2013-58.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 ISMQC 2013
- Title:
11th International Symposium on Measurement and Quality Control
- Place:
- Cracow and Kielce, POLAND
- Time:
- 11 September 2013 - 13 September 2013