A HIGH-STABLE PRESSURE SENSOR BASED ON A SOI HETEROSTRUCTURE AND MEMS TECHNOLOGY FOR AN INTELLIGENT INSTRUMENTS
Leonid Sokolov
Abstract:
The time stability of pressure transducers is a necessary condition which provides the measurement and computation of ? flight data by an aircraft computer with required accuracy.
As compared with Weston Aerospace up-to-date highstable electromechanical pressure transducers, which use a resonance effect in a vibrating cylinder, semiconductor microelectromechanical sensors (SMEMS) have advantages in possible integration with a signal microprocessor circuit and in group manufacturing based on advanced MEMS technologies.
Honeywell is known to be conducting efforts in replacing electromechanical sensors with microelectromechanical ones in an aircraft flight data system.
Electrical p-n junctions in conventional silicon sensors are prerequisites for the time instability of sensors and an aircraft flight data measurement system as a whole. Conventional micromechanical piezoresistive sensors, which contain electric p-n junctions, have a limited operational temperature range due to the exponential dependence of reverse current from the p-n junction temperature as known in the semiconductor physics I0 ~ ni² ~ exp[-Δ EF/(k T)].
The capabilities of measurement error correction using microprocessor techniques for transfer characteristic linearization, temperature compensation and other parameters become significantly complicated due to the instability of the transfer characteristic of conventional SMEMS.
The developed concept, which eliminates the usage of p-n junctions in SMEMS, forms the basis for the proposed solutions and the principles of developing integral high-stable SOI-based membrane-type pressure sensors with a monolithic tensoframe.
Keywords:
MEMS sensor, SOI, monolithic tensoframe
Download:
IMEKO-TC14-2013-68.pdf
DOI:
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Event details
IMEKO TC:
TC14
Event name:
TC14 ISMQC 2013
Title:

11th International Symposium on Measurement and Quality Control

Place:
Cracow and Kielce, POLAND
Time:
11 September 2013 - 13 September 2013
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