FAST INTEGRAL OPTICAL ROUGHNESS MEASUREMENT OF SPECULAR REFLECTING SURFACES IN THE NANOMETER RANGE
S. Patzelt, F. Horn, G. Goch
Abstract:
A fast optical roughness measuring device with a compact design is presented. The measuring principle is based on double scattering of coherent light. The measurement results in an integral statistical roughness value like Ra or Rq according to ISO 4287. It is valid for the illuminated surface area with diameters between 0.5 mm and 10 mm at a resolution of about 1 nm (Ra-value). A simulation model of the optical roughness measuring process based on the Huygens-Fresnel approximation was implemented. The simulation tool enables to investigate potential improvements of the measuring method without expensive and time consuming experiments.
Keywords:
Roughness, doubly scattered laser light, speckle correlation, simulation
Download:
PWC-2006-TC2-006u.pdf
DOI:
-
Event details
Event name:
XVIII IMEKO World Congress
Title:

Metrology for a Sustainable Development

Place:
Rio de Janeiro, BRAZIL
Time:
17 September 2006 - 22 September 2006
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