INVESTIGATIONS TO THE USE OF SINGLE-CRYSTALLINE SILICON AS MECHANICAL SPRING IN LOAD CELLS |
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| Sascha Mäuselein, Oliver Mack, Roman Schwartz |
- Abstract:
- This article presents investigation results to the use of single-crystalline silicon as mechanical spring in load cells. As a result of the crystalline structure a very high reproducibility of the material properties is expected. In addition the mechanical aftereffects of single-crystalline silicon are by the factor of 100 smaller than in metallic materials. Performed simulations using the finite element method consider anisotropic and brittle material behavior. It is shown that silicon as mechanical spring material in combination with sputtered metal strain gauges principally can be used for load cells and force sensors.
- Keywords:
- silicon, load cells, force sensors, FEM simulations
- Download:
- PWC-2006-TC3-007u.pdf
- DOI:
- -
- Event details
- Event name:
- XVIII IMEKO World Congress
- Title:
Metrology for a Sustainable Development
- Place:
- Rio de Janeiro, BRAZIL
- Time:
- 17 September 2006 - 22 September 2006