PRESSURE SENSOR WITH SI3N4 DIAPHRAGM AND OPTOELECTRONIC SENSING |
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| P. Beneš, F. Matejka, R. Vrba, V. Kolarík |
- Abstract:
- Sensitive pressure sensor with nitride membrane and optoelectronic read-out system is described. Measured pressure is transformed into thick layer nitride membrane deflection. Nitride membrane serves as a mirror for laser beam and can move reflected laser mark. Mark’s position is sensed using position sensing device – fotolateral diode. Diode double current signal is amplified and conditioned digitally by ADuC 812 microcomputer. This one chip microcomputer provides an IEEE 1451.2 interface.
- Keywords:
- pressure, nitride membrane, optoelectronic, standard IEEE 1451
- Download:
- IMEKO-TC4-2001-065.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC4
- Event name:
- TC4 Symposium 2001
- Title:
11th IMEKO TC4 Symposium on Trends in Electrical Measurements and Instrumentation (together with 6th IMEKO TC4 Workshop on ADC Modelling and Testing)
- Place:
- Lisbon, PORTUGAL
- Time:
- 13 September 2001 - 14 September 2001