MULTILAYER CERAMIC TECHNOLOGY APPLICATIONS TO MASS FLOW CONTROL |
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| Mario R. Gongora-Rubio, Luis M. Sola-Laguna, Jorge J. Santiago-Aviles |
- Abstract:
- Micro-fluidic devices suitable to MFC were fabricated using LTCC technology from the emerging field of Meso-Scale systems. A multiplicity of hybrid devices can be developed using this flexible technology because this is a hermetic and compatible material ideal for fluidic systems.
Meso-fluidic devices as micro-valve, pressure, temperature sensor and critical orifices associated with fluidic interconnections can be integrated using LTCC technology in order to implement mass flow control systems for low flow and pressure ranges. We have measured several device parameters; micrographs of the fabricated devices and drawing of the proposed MFC are presented. - Keywords:
- MST (Micro-System Technology), LTCC (Low Temperature Cofire Ceramics), meso-systems, sensors, actuators, MFC (Mass Flow Control), MEMS (Micro-electromechanical systems)
- Download:
- IMEKO-TC9-2000-093.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC9
- Event name:
- FLOMEKO 2000
- Title:
- 10th Conference on Flow Measurement
- Place:
- Salvador, Bahia, BRAZIL
- Time:
- 04 June 2000 - 08 June 2000