A SILICON FLOW SENSOR FOR HIGHLY ACCURATE MASS FLOW MEASUREMENT |
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| Michel J. A. M. van Putten, Pascal F. A. M. van Putten |
- Abstract:
- We describe a thermal, silicon integrated, mass flow sensor for highly accurate mass flow measurements over a large dynamic range. Offset-drift is completely eliminated by application of the VanPutten-ADM method. The method is illustrated using air. The total measurement uncertainty is typically < 1% of reading, with a turndown larger than 1:1000.
- Keywords:
- thermal, silicon flow sensor, VanPutten-ADM
- Download:
- IMEKO-TC9-2000-094.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC9
- Event name:
- FLOMEKO 2000
- Title:
- 10th Conference on Flow Measurement
- Place:
- Salvador, Bahia, BRAZIL
- Time:
- 04 June 2000 - 08 June 2000