EVALUATION OF ADSORPTION EFFECT BY USING SILICON SPHERE AND SILICON SURFACE ARTEFACTS
|Jin Wan Chung, Sungjun Lee, Woo Gab Lee|
- KRISS mass laboratory is studying the adsorption effect of the weight and silicon (Si) surface by using the precise mass comparator which can be used in vacuum and developing the ellipsometric system. For its preliminary study, the mass of Si sphere which is using for the density standard at KRISS density laboratory is measured in air before and after vacuum. Si surface artifacts (SAs) are fabricated and measured dimension and roughness. Preliminary experiments are carried out in vacuum and in air.
In this paper, we report on a preliminary study conducted at the KRISS in which we examined the adsorption mass measurement of 1 kg Si sphere, SA cylinder (SA-C) and SA disks (SA-D).
- adsorption mass, Avogadro constant, Si sphere
- Event details
- Event name:
- XVIII IMEKO World Congress
Metrology for a Sustainable Development
- Rio de Janeiro, BRAZIL
- 17 September 2006 - 22 September 2006