THERMO-MECHANICAL MATERIAL CHARACTERIZATION OF PHTOTORESISTS WITH HIGH ASPECT RATIO |
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| J. Vogel, H.-J. Feige, J. Saupe, G. Grützner, J. Grimm |
- Abstract:
- MEMS made of photosensitive polymers offer new functionalities and applications in the micro world. Additionally to the new materials and advanced technologies the analysis of the thermo-mechanical material properties is required to ensure reliability and lifetime. Under this point of view, an uniaxial micro tensile measuring system has been developed to determine stress-strain-curves, Young’s modulus or Poisson’s ratio. The results will be shortly compared with those of Dynamic-Mechanical Analysis (DMA).
- Keywords:
- photosensitive polymers, material properties, microtensile test by DIC, DMA
- Download:
- IMEKO-YSESM-2014-031.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC15
- Event name:
- TC15 Youth Symposium 2014
- Title:
13th Youth Symposium on Experimental Solid Mechanics
- Place:
- Děčín, CZECH REPUBLIC
- Time:
- 29 June 2014 - 02 July 2014