DEFLECTOMETRIC PROFILER WITH SMALL BEAM SIZE USING A COMMERCIALLY AVAILABLE AUTOCOLLIMATOR |
|---|
| Youichi Bitou, Yohan Kondo |
- Abstract:
- The special resolution of the angle-based deflectometric surface profiler has been improved by introducing a novel null instrument. Proposed null instrument is simple, inexpensive, and has fast response time. High accuracy flatness measurement for low reflective surface has been successfully demonstrated with 1 mm laser beam spot size. The repeatability of the surface form measurement is better than ±0.6 nm.
- Keywords:
- flatness, metrological instrumentation, surface form measurement, deflectometry, autocollimator
- Download:
- IMEKO-TC14-2014-03.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 LMPMI Symposium 2014
- Title:
11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry
- Place:
- Tsukuba, JAPAN
- Time:
- 03 September 2014 - 05 September 2014