INTERFERENCE METHOD FOR ULTRA-PRECISION MEASUREMENT OF ANGULAR MICRO-DEFLECTION |
|---|
| Marek Dobosz |
- Abstract:
- A new interferometric method for ultra-precise measurement of laser beam angular deflection is presented. Also angular tilt of measuring device in relation to the beam axis can be measured. The method is based on interference fringe period analysis in the selected plane of measurement. We proof that if the number of beam reflections in the interferometer arms differs by an odd number, then the deflection of the input beam can be measured by evaluating the change of the observed interference fringe period.
The theoretical basis and experimental verification of the method are presented. Two interferometer designs are compared. Influence of the wavelength change and the lateral shifts of the beam axis on laser beam deflection measurement are analyzed. Resolution reaching single nanoradians (0,001 arcsec) is shown. The main feature of the proposed method is that the applied interference system can be very small (having a volume of approximately 1 cm³). Design of the sensor can be extremely robust, and insensitive to the most common disturbances (like temperature, linear displacements etc.). Because of these feature, the system can be applied easily in laser design as a system for output beam angular stabilization. Also angular deflection of the interferometer set-up in relation to the input beam axis can be measured. - Keywords:
- measurement, laser beam deflection, interferometer, pointing stability
- Download:
- IMEKO-TC14-2014-05.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 LMPMI Symposium 2014
- Title:
11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry
- Place:
- Tsukuba, JAPAN
- Time:
- 03 September 2014 - 05 September 2014