LASER BASED ASPHERE AND FREEFORM MEASUREMENT TECHNOLOGY BY UA3P |
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| Keishi Kubo |
- Abstract:
- Recently the demand of the metrology for large asphere and freeform optics are increasing for digital camera and other area. We have developed new technology having the accuracy is less 0.1 um and scanning speed is 30 mm/s using the linear motor and the air bearing system based on the He-Ne stabilized frequency laser coordinate measurement system. By using this technology, we developed form measurement machine UA3P-650H, having larger measurement area XY 500 mm and Z 120 mm for asphere and freeform surfaces.
When we think about asphere and freeform measurement, the form accuracy is needed not only the deviation from bestfit radius form but also the absolute radius form, by reason of the focal length is depending on the absolute dimension of surface form. In this case, it’s suitable to use He-Ne frequency stabilized laser which has the traceability to the international length standard.
And we will introduce how to measure freeform surfaces and the off axis asphere by using this technology.
For the increasing demand for the measurement of mobile and smart phone aspherical lenses, we have developed automatic measurement function additionally conventional UA3P series. And we have developed special unit and function for this machine to measure 4,000 lenses on the single wafer. - Keywords:
- measurement, laser, tactile, aspherical, freeform
- Download:
- IMEKO-TC14-2014-14.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 LMPMI Symposium 2014
- Title:
11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry
- Place:
- Tsukuba, JAPAN
- Time:
- 03 September 2014 - 05 September 2014