ABSOLUTE LENGTH-MEASURING SYSTEM BY AUTOMATIC INTERFERENCE-FRINGE-PEAK DETECTION WITH OPTICAL-COMB FIBER INTERFEROMETER |
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| Hirokazu Matsumoto, Kiyoshi Takamasu |
- Abstract:
- Optical frequency comb has various characteristics such as short pulse, broad spectra, many spectral lines, and high temporal coherency. In this present, new absolute length-measuring technique with a high resolution of 0.1 µm is developed by using temporal-coherence interferometry of optical comb and a short translation stage for various length ranges. A new fiber Fabry-Perot etalon of a free spectral range of a frequency of 15 GHz is developed for improving the fine positioning in space. Moreover, interference-fringe-peak is automatically achieved by developing a new analog electric circuit. One position is measured round several milliseconds depending to the SN ratio of the signal detected for various ranges of the lengths measured.
- Keywords:
- length/distance measurement, high repetition frequency, optical comb, absolute metrology
- Download:
- IMEKO-TC14-2014-19.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 LMPMI Symposium 2014
- Title:
11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry
- Place:
- Tsukuba, JAPAN
- Time:
- 03 September 2014 - 05 September 2014