NON-CONTACT MEASUREMENT TECHNIQUE FOR DIMENSIONAL METROLOGY USING OPTICAL COMB |
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| Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu |
- Abstract:
- This paper proposes non-contact pulse interferometer for dimensional metrology using the repetition frequency of the optical frequency comb. The repetition frequency of 100 MHz of a general optical frequency comb is transferred to that of 1 GHz by using a Fabry-Pérot Etalon, which is firstly developed by single mode optical fiber. Therefore, temporal-coherence interference fringes are generated at each several cm and then compact absolute position- measuring system is realized for practical non-contact use with a high accuracy measurement. The stability and accuracy of measurements are compared with commercial incremental laser interferometer. The drifts of both systems are the same tendency. The maximum drift difference between two interferometer systems is about 0.1 µm. And the maximum difference of length measurement of both systems is about 0.18 µm at the length of 150 mm while the maximum standard deviation of pulse interferometer is better than incremental interferometer about 10 times. Then, the pulse interferometer is constructed and a metal sphere ball is used as a target of interferometer. The average standard deviation of distance/length measurement is about 0.6 µm for the measuring length up to 1.5 m. This new technique can provide a high accuracy for non-contact measurement system such as a simple pulse tracking system.
- Keywords:
- non-contact measurement, pulse interferometer, absolute length measurement, dimensional metrology
- Download:
- IMEKO-TC14-2014-23.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 LMPMI Symposium 2014
- Title:
11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry
- Place:
- Tsukuba, JAPAN
- Time:
- 03 September 2014 - 05 September 2014