CALIBRATION OF INVAR ANGULAR INTERFEROMETER OPTICS WITH MULTI-STEP METHOD
Yao Huang, Zi Xue, He Yan Wang
Abstract:
In National Institute of Metrology, China (NIM), the Small Angle Measuring System which is based on sine principle, is developed as the national primary standard for the plane angle in the angular measuring range ±5°. The measurement uncertainty of this system is dominated by the accuracy of an Invar Angular Interferometer Optics. To calibrate this Invar Interferometer system, a series of known reference standards were given with multi-step method using a double-deck rotary table. The calibration got an uncertainty lower than 0.03 arcsec (k = 2).
Keywords:
calibration, angle measuring, invar angular interferometer optics, multi-step method
Download:
IMEKO-TC14-2014-26.pdf
DOI:
-
Event details
IMEKO TC:
TC14
Event name:
TC14 LMPMI Symposium 2014
Title:

11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry

Place:
Tsukuba, JAPAN
Time:
03 September 2014 - 05 September 2014
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