3-D SURFACE PROFILOMETRY EMPLOYING THE POLARIZATION PHASE SHIFTING TECHNIQUE |
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| David I. Serrano-Garcia, Yukitoshi Otani |
- Abstract:
- Optical measurement techniques have become indispensable tools in many areas of science and engineering. The whole-field, non-contact and highly accurate measurement are among the principal features of these techniques. The purpose of this research is to analyze the case when the sample under study presents polarization properties, as retardance or diattenuation. The use of phase shifting modulated by polarization has the advantage of not requiring mechanical components, such as a piezoelectric transducer (PZT), to obtain the phase shifts. The main purpose of introducing polarization phase shifting techniques, added with replication systems, is to collect all the phase-shifted data in a single exposure in order to minimize time-varying environmental effects. When the sample under study changes the polarization properties of the object-beam, errors associated at the contrast and phase shift values on the final interferogram are obtained. The main purpose of this work is to find a suitable model in charge to modelate when the sample presents polarization properties as retardance or diattenuation. A model based in find a Mueller matrix of the polarization phase shifting interferometer is introduced in order to settle the basis for a non-ideal model.
- Keywords:
- interferometry, polarization analysis, phase shifting technique
- Download:
- IMEKO-TC14-2014-30.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 LMPMI Symposium 2014
- Title:
11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry
- Place:
- Tsukuba, JAPAN
- Time:
- 03 September 2014 - 05 September 2014