MEASUREMENT OF SURFACE ROUNDNESS USING A MULTI-BEAM ANGLE SENSOR |
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| Meiyun Chen, Soichiro Ueda, Satoru Takahashi, Kiyoshi Takamasu |
- Abstract:
- This paper analyses existing techniques and proposes a newly technology named Multi-Beam Angle Sensor (MBAS) for measuring the roundness errors. Comparing with other methods, MBAS has just used one sensor and independence on the rotary stage, and can be used as a simple and convenient one in factory-level. Stability can also be improved by using the MBAS. In this paper, the optical probe is based on the principle of autocollimator and has a stability of 0.3 arcsec. Unlike multi- probe methods, the MBAS is constructed to realize the roundness measurement by using only one probe, which is less susceptible to instrumental errors. The experimental results confirming the feasibility of the MBAS for roundness measurement are also presented.
- Keywords:
- roundness, measurement, MBAS, metrology, stage-independence
- Download:
- IMEKO-TC14-2014-33.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 LMPMI Symposium 2014
- Title:
11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry
- Place:
- Tsukuba, JAPAN
- Time:
- 03 September 2014 - 05 September 2014