DEVELOPMENT OF DIMENSIONAL X-RAY COMPUTED TOMOGRAPHY

Hiroyuki Fujimoto
Abstract:
Recently, a dimensional X-ray computed tomography system that is capable of dimensional measurements is strongly waited because the realization of dimensional measurements for outward forms and inward forms on dense spatial points in short time duration remarkably simplifies and accelerates production loop. However the obtained image of the XCT describes the structure clear and in great detail, the realization of the dimensional metrology by the XCT is not simple.
National metrology institute of Japan have been continued the performance test using gauges that includes the gauges proposed in ISO10360. The magnification variation correction is carefully introduced and that the maximum deviation of less than 5 µm is shown to be possible by the measurement of the forest phantom of 27 sapphire balls whose locations are calibrated by the coordinate measuring machine.
Keywords:
X-ray Computed Tomography, dimensional measurement, phantom, industrial standards
Download:
IMEKO-TC14-2014-36.pdf
DOI:
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Event details
IMEKO TC:
TC14
Event name:
TC14 LMPMI Symposium 2014
Title:

11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry

Place:
Tsukuba, JAPAN
Time:
03 September 2014 - 05 September 2014