RECENT DEVELOPMENTS OF THE 3D FIBER PROBE
Ulrich Neuschaefer-Rube, Holger Bremer, Benjamin Hopp, Ralf Christoph
Abstract:
The fiber probe is well known in micro-coordinate metrology. The 2D version has been used for many years to measure injector nozzles, turbine blade cooling holes, and a variety of other small, tight tolerance features. A development of this probe, the 3D fiber probe, has been commercially available for some time.
In a cooperation project, PTB and Werth Messtechnik have continued investigations on this microprobe. This paper reports on the recent achievements. Very small stylus tips with diameters down to 25 µm with isotropic stiffness and novel probe designs are now possible. Dual-sphere and L-shaped styli have opened new applications for holes with large aspect ratios and recessed features. Scanning tests have resulted in form deviations below 0.4 µm.
This paper explains the operating principle, reports on test results and describes some of the applications.
Keywords:
coordinate metrology, microprobe, tactile-optical probe, WFP 3D, 3D fiber probe
Download:
IMEKO-TC14-2014-45.pdf
DOI:
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Event details
IMEKO TC:
TC14
Event name:
TC14 LMPMI Symposium 2014
Title:

11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry

Place:
Tsukuba, JAPAN
Time:
03 September 2014 - 05 September 2014
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