CALIBRATOR FOR 2D GRID PLATE USING VISION COORDINATE MEASURING MACHINE WITH LASER INTERFEROMETERS |
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| Mariko Kajima, Tsukasa Watanabe, Makoto Abe, Toshiyuki Takatsuji |
- Abstract:
- A calibrator for 2D grid plate based on a commercial vision coordinate measuring machine (vision-CMM) was developed. A laser interferometer for calibration of x coordinate and two laser interferometers for calibration of y coordinate were attached on the vision-CMM. By applying multi step measurement method for the calibration procedure, the dimensional error in the calibrator could be reduced. The calibration uncertainty for 2D grid plate using developed calibrator could be estimated as sub-micrometer level.
- Keywords:
- grid plate, vision coordinate measuring machine, laser interferometer
- Download:
- IMEKO-TC14-2014-54.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 LMPMI Symposium 2014
- Title:
11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry
- Place:
- Tsukuba, JAPAN
- Time:
- 03 September 2014 - 05 September 2014