CALIBRATION AND UNCERTAINTY EVALUATION OF FLICK STANDARD USING COORDINATE-MEASURING MACHINE |
|---|
| Yohan Kondo, Youichi Bitou, Osamu Sato, Makoto Abe |
- Abstract:
- Flick standard is a cylindrical artifact with a flat part for calibrating the magnification of a probe of roundness measuring-instruments. A probe magnification of roundness measuring-instruments is evaluated by measuring a calibrated flick value of a flick standard. The flick value is a distance between a cross-section circle and a cross-section line. In factory field, it is required that the flick value is calibrated within 0.1 µm with respect to several micrometer to several hundred micrometer. The flick value is generally calibrated by an accurate roundness measuring-instrument. It has a linear error of a probe with about 0.1% or more gain error. When the flick value is 100 µm, the measurement uncertainty is 0.1 µm or more. We calibrated a flick standard using an ultra-high accurate coordinate measuring instrument (CMM) with a laser interferometer to ensure the measurement uncertainty within 0.1 µm. The length measurement system by the laser interferometer is according to the abbe principle. In this paper, we describe the calibration method of a flick standard using the CMM. We calibrated the flick standard using a multiple-measurement technique to eliminate the systematic error of the CMM and estimated its uncertainty based on the analysis of variance. Finally, the proposed calibration method is validated through experiments.
- Keywords:
- Flick standard, roundness measuring- instrument, coordinate measuring-machine, interferometer, uncertainty
- Download:
- IMEKO-TC14-2014-59.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 LMPMI Symposium 2014
- Title:
11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry
- Place:
- Tsukuba, JAPAN
- Time:
- 03 September 2014 - 05 September 2014