DEVELOPMENT OF HIGH ACCURATE GEAR ARTIFACT MEASURING INSTRUMENT BASED ON LASER INTERFEROMETRY

Hu Lin, Zi Xue, Guoliang Yang, Yao Huang, Heyan Wang
Abstract:
A specialized high accurate gear artifact measuring instrument based on laser interferometry is developed in National Institute of Metrology (NIM, China), to fulfill the increasing demand for high accurate calibration of gear artifacts. This measuring instrument mainly consists of three linear guide rails, a rotary table, a 3D scanning probe and a laser measuring system. In the laser measuring system, laser beam from laser head is splited along two paths, one is arranged tangent to the base circle of gear for the measurement of profile deviation, another is arranged parallel to the gear axis for the measurement of helix deviation, both laser measurement performed with a resolution of 0.3nm. To minimize the influence of Abbe error, two cube-corner reflectors are placed close to the tip of probe. This measuring instrument operated automatically, during the measurement of gear artifact, all the signals from guide rails, rotary table, probe and laser measuring system are obtained synchronously. A software collects all the data for further calculation and evaluation. Development of this instrument makes it possible to guarantee the measurement of profile and helix direct traceable to the standard laser wavelength.
Keywords:
gear measuring instrument, Abbe error, gear artifact, traceability, laser interferometry
Download:
IMEKO-TC14-2014-63.pdf
DOI:
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Event details
IMEKO TC:
TC14
Event name:
TC14 LMPMI Symposium 2014
Title:

11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry

Place:
Tsukuba, JAPAN
Time:
03 September 2014 - 05 September 2014