SIMPLE OPTICAL CHARACTERIZATION METHOD FOR THOUSANDS OF SMALL MICROLENSES FOR INDUSTRIAL MASS-PRODUCTION APPLICATIONS |
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| Myun-Sik Kim, Jonathan Sunarjo, Lisa Allegre, Reinhard Voelkel |
- Abstract:
- We present various metrology techniques for small-size microlenses, which can be applied to a single lens or thousands of microlenses. An individual microlens can be characterized by its optical performance and surface profile characteristics. First, the optical performance is characterized by using a high-resolution interference microscope (HRIM), which consists of Mach-Zehnder interferometer and an optical microscope. Second, a confocal microscope is applied to investigate the surface profile parameters. Third, the three-dimensional (3D) intensity distribution near the focus can be measured by the axial scanning function of the HRIM. Such 3D intensity maps allow us to characterize the focal properties of microlenses in an array. By deeply understanding those characterization techniques and measurement outputs, we develop a new method to characterize a large number of microlenses, for instance, more than one million lenses. This method is currently applied to wafer-based manufacturing in a cleanroom fab.
- Keywords:
- micro-optics, microlens array, optical shop test, interferometric characterization, Strehl ratio
- Download:
- IMEKO-TC14-2014-66.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 LMPMI Symposium 2014
- Title:
11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry
- Place:
- Tsukuba, JAPAN
- Time:
- 03 September 2014 - 05 September 2014