ON EVALUATION OF RESOLUTION PERFORMANCE OF HIGH ENERGY X-RAY CT
Makoto Abe, Hiroyuki Fujimoto, Osamu Sato, Katsutoshi Sato, Toshiyuki Takatsuji
Abstract:
Dimensional X-ray CT has attracted production industry due to its nature enabling not only external dimensional measurement but also internal dimensional measurement which has been difficult for pre-existing dimensional measurement instruments. However, because the reconstruction process of three dimensional volume image may be affected by various kinds of error sources of the hardware and also the software, performance evaluation of dimensional X-ray CT has become one of the major issues, especially for X-ray CT system with higher energy such as several MeV. Resolution performance of high energy X-ray CT was evaluated by using a series of phantoms which equip regular line-and-space structures with various pitch sizes from 10,000 down to 100 micrometer. These phantoms were prototyped in the identical pitch sizes with three different materials, namely Tungsten, Molybdenum, and Steel alloy. These phantoms were practically measured by a high energy X-ray. Preliminary evaluation results are presented as well as the design intention.
Keywords:
X-ray CT, resolution, phantom, performance evaluation
Download:
IMEKO-TC14-2014-75.pdf
DOI:
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Event details
IMEKO TC:
TC14
Event name:
TC14 LMPMI Symposium 2014
Title:

11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry

Place:
Tsukuba, JAPAN
Time:
03 September 2014 - 05 September 2014
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