EMPIRICAL ANALYSIS OF MEASUREMENT UNCERTAINTY FOR THE INSPECTION OF MICRO-FEATURES USING A CONFOCAL MICROSCOPE |
|---|
| Teresa Werner, Fengzhou Fang |
- Abstract:
- While for measurements on the macro-scale the applied measurement systems and typical influences are generally well understood, this does not hold true for measurements on the micro-scale. This limited knowledge results in a rather high value of measurement uncertainty. Thus, to support a suitable analysis of measurement uncertainty and at the same time enable a targeted improvement of the implemented measurement strategy, an empirical method for the determination of measurement uncertainty based on a systematic approach for system analysis is proposed.
On the example of inspecting parts with micro-features by a confocal microscope, a strategy has been developed to identify and quantify relevant influence factors on the measurement result, applying methods of Design of Experiments (DoE). By statistical evaluation of the results gathered there, an empirical description of the measurement system was synthesized. Major influence factors have been described and the influence of several options for the measurement strategy on the reliability of the measurement results have been quantified.
Based on this characterization, a value for measurement uncertainty was determined. Also, recommendations for ideal conditions of the measurement and the applied strategy have been derived. By applying such findings to the actual performance of measurements as well as to the according uncertainty budget, the overall uncertainty of the measurement results can be effectively reduced. Thus, an experimental strategy for the analysis of measurement uncertainty can at the same time support the determination of a realistic value for measurement uncertainty and the improvement of applied measurement strategies. - Keywords:
- measurement strategy, reliability, micro-metrology, confocal microscope
- Download:
- IMEKO-TC14-2014-79.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 LMPMI Symposium 2014
- Title:
11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry
- Place:
- Tsukuba, JAPAN
- Time:
- 03 September 2014 - 05 September 2014