IMPROVEMENT IN LONG TERM STABILITY OF THE LONG RANGE AFMS |
|---|
| Nataliya Vorbringer-Dorozhovets, Eberhard Manske |
- Abstract:
- Long range AFMs suffer mainly from drift due to the relative long measurement times and from tip wear due to the large measured distances. After investigations of the long term stability of the AFMs, in this work, the recommendations for planning and realization of the long range measurements are proposed.
- Keywords:
- AFM, long range AFM, nanopositioning and nanomeasuring machine, NPM machine, long distance measurements
- Download:
- IMEKO-WC-2015-TC6-176.pdf
- DOI:
- -
- Event details
- Event name:
- XXI IMEKO World Congress
- Title:
Measurement in Research and Industry
- Place:
- Prague, CZECH REPUBLIC
- Time:
- 30 August 2015 - 04 September 2015