AN OPTICAL CALIBRATION METHOD FOR A DOUBLE-SLIT INTERFEROMETER CAPABLE OF INSPECTING THICKNESS VARIATION OF MOVING GLASS PANELS

Chu-Shik Kang, Jong-Ahn Kim, Jae Wan Kim, Jonghan Jin
Abstract:
A double-slit interferometer capable of inspecting thickness variation of a moving glass panel with nanometric resolution, and its calibration method using a partly electrode-coated nematic liquid crystal cell are presented.
Keywords:
double-slit, interferometer, thickness variation, calibration, liquid crystal
Download:
IMEKO-WC-2015-TC14-295.pdf
DOI:
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Event details
Event name:
XXI IMEKO World Congress
Title:

Measurement in Research and Industry

Place:
Prague, CZECH REPUBLIC
Time:
30 August 2015 - 04 September 2015