AN OPTICAL CALIBRATION METHOD FOR A DOUBLE-SLIT INTERFEROMETER CAPABLE OF INSPECTING THICKNESS VARIATION OF MOVING GLASS PANELS |
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| Chu-Shik Kang, Jong-Ahn Kim, Jae Wan Kim, Jonghan Jin |
- Abstract:
- A double-slit interferometer capable of inspecting thickness variation of a moving glass panel with nanometric resolution, and its calibration method using a partly electrode-coated nematic liquid crystal cell are presented.
- Keywords:
- double-slit, interferometer, thickness variation, calibration, liquid crystal
- Download:
- IMEKO-WC-2015-TC14-295.pdf
- DOI:
- -
- Event details
- Event name:
- XXI IMEKO World Congress
- Title:
Measurement in Research and Industry
- Place:
- Prague, CZECH REPUBLIC
- Time:
- 30 August 2015 - 04 September 2015