SELF-CALIBRATION FOR OPTICAL PATH LENGTH OF 3D NANOPROFILER CONSIDERING RANDOM ERROR

Ryota Kudo, Kohei Okuda, Kenya Okita, Yusuke Tokuta, Shun Nakatani, Motohiro Nakano, Kazuya Yamamura, Katsuyoshi Endo
Abstract:
In 3D nanoprofiler we develop, the optical path length is the largest uncertainty factor. As a method for self-calibration of the optical path length, we propose a method of utilizing a known optical path length shift. Results of simulation considering the random error, the accuracy was found to be dependent on 3 parameters. Similar characteristics is confirmed by experiment. Optical path length has been determined by the order of under four digits.
Keywords:
nanoprofiler, self-calibration, optical path length, direct measurement, free-form
Download:
IMEKO-WC-2015-TC14-296.pdf
DOI:
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Event details
Event name:
XXI IMEKO World Congress
Title:

Measurement in Research and Industry

Place:
Prague, CZECH REPUBLIC
Time:
30 August 2015 - 04 September 2015
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